Plasma chemistry study of PLAD processes

Shu Qin(Micron (United States)), Maoying Wang(Micron (United States)), Kyle D. Brumfield(University of Maryland, College Park), Yongjun Hu(South China Normal University), Wei Hui Hsu(Micron (United States)), Lequn Jennifer Liu(Micron (United States)), Allen McTeer(Micron (United States))
AIP conference proceedings
January 1, 2012
Cited by 3


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