Impact of work function metal stacks on the performance and reliability of multi-V RMG CMOS technology

J. Franco(KU Leuven), B. Kaczer(IMEC), E. Dentoni Litta(IMEC), Hiroaki Arimura(IMEC), Naoto Horiguchi(IMEC), S. Brus(University of Liège), Kristof Croes(IMEC)
Solid-State Electronics
March 30, 2024
Cited by 4


Related Papers