Low thermal budget PBTI and NBTI reliability solutions for multi-Vth CMOS RMG stacks based on atomic oxygen and hydrogen treatments
J. Franco(KU Leuven), B. Kaczer(IMEC), K. Croes(IMEC), D. Claes(IMEC), S. Brus(University of Liège), Jean‐François de Marneffe(IMEC), H. Arimura(IMEC), Naoto Horiguchi(IMEC), E. Dentoni Litta(IMEC), A. Vandooren(IMEC)
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