Low thermal budget PBTI and NBTI reliability solutions for multi-Vth CMOS RMG stacks based on atomic oxygen and hydrogen treatmentsJ. Franco, B. Kaczer, S. Brus et al.|2022 International Electron Devices Meeting (IEDM)|2022Cited by 11
Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack SolutionsJ. Franco, Naoto Horiguchi, Hiroaki Arimura et al.|Unknown|2023Cited by 8