Soft-x-ray projection lithography experiments using Schwarzschild imaging optics
Daniel A. Tichenor(Sandia National Laboratories California), David L. Windt(Reflective X Ray Optics), Kurt W. Berger(Sandia National Laboratories California), Jeffrey Bokor(Berkeley College), Alastair A. MacDowell(AT&T (United States)), T. E. Jewell(AT&T (United States)), L. A. Brown(Sandia National Laboratories California), W. K. Waskiewicz(AT&T (United States)), Glenn D. Kubiak(Sandia National Laboratories California), D. M. Tennant(University of Tennessee at Knoxville), J. E. Bjorkholm(AT&T (United States)), R. H. Stulen(Sandia National Laboratories California), William C. Sweatt(Sandia National Laboratories California), Marcin Malinowski(Sandia National Laboratories California), R. R. Freeman(AT&T (United States)), O. R. Wood(AT&T (United States)), Marc D. Himel(AT&T (United States)), W Mansfield(AT&T (United States)), D. L. White(AT&T (United States)), Steven J. Haney(Sandia National Laboratories California)
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