R. H. Stulen

Sandia National Laboratories California

3 papers and 34 citations.

3Publications

34Total Citations

Top publicationsby citations

Soft-x-ray projection lithography experiments using Schwarzschild imaging optics

Daniel A. Tichenor, David L. Windt, L. A. Brown et al.|Applied Optics|1993

Cited by 12

Printability of substrate and absorber defects on extreme ultraviolet lithographic masks

K. B. Nguyen, David L. Windt, R. H. Stulen et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1995

Cited by 11

Fabrication of metal–oxide–semiconductor devices with extreme ultraviolet lithography

K. B. Nguyen, Linus A. Fetter, G. F. Cardinale et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1996

Cited by 11

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