Capping-metal gate integration technology for multiple-V<inf>T</inf> CMOS in MuGFETs
A. Veloso(IMEC), M. Jurczak(IMEC), L. Witters(IMEC), Rita Vos(IMEC), S. Brus(University of Liège), Thierry Conard(IMEC), Nadine Collaert(IMEC), N.J. Son(IMEC), M. Demand(IMEC), Ph. Roussel(IMEC), B. Kaczer(IMEC), Isabelle Ferain(IMEC), Christoph Adelmann(Imec the Netherlands), H. Bender(IMEC), Sven Van Elshocht(Columbia University), R. Rooyackers(IMEC), Olivier Richard(IMEC), K. De Meyer(IMEC), S. Biesemans(IMEC)
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