Transistor characteristics with Ta/sub 2/O/sub 5/ gate dielectric
Donggun Park(University of California, Berkeley), Chia-Cheng Cheng(Lam Research (Austria)), Sing-Pin Tay(Engineering Associates (United States)), Ya‐Chin King(University of California, Berkeley), Chenming Hu(Semiconductor Manufacturing International (Italy)), A. Kalnitsky(Texas Instruments (United States)), Tsu-Jae King(University of California, Berkeley), Qiang Lu(University of California, Berkeley)
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