5nm-gate nanowire FinFET

Fu-Liang Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chenming Hu(Semiconductor Manufacturing International (Italy)), Jyu-Horng Shieh(Taiwan Semiconductor Manufacturing Company (Taiwan)), Jam-Wem Lee(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yee‐Chia Yeo(National University of Singapore), Hou-Yu Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Ying-Ho Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Bor-Wen Chan(Taiwan Semiconductor Manufacturing Company (Taiwan)), Di-Hong Lee(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chi‐Chun Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Shengda Liu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chih-Jian Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chang-Yun Chang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yiming Li(National Yang Ming Chiao Tung University), Pu Chen(University of Waterloo), Hung-Wei Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Cheng-Chuan Huang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chien-Chao Huang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chung-Cheng Wu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Han-Jan Tao(Taiwan Semiconductor Manufacturing Company (Taiwan)), Mong-Song Liang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Peng-Fu Hsu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Tang-Xuan Chung(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yi-Hsuan Liu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Shih-Chang Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Ying-Tsung Chen(Taiwan Semiconductor Manufacturing Company (Taiwan))
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January 1, 2004
Cited by 249


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