Engineering of Hf<inf>1−x</inf>Al<inf>x</inf>O<inf>y</inf> amorphous dielectrics for high-performance RRAM applications

A. Fantini(IMEC), M. Jurczak(IMEC), Sergiu Clima(IMEC), A. Redolfi(IMEC), Attilio Belmonte(IMEC), Masanori Komura(IMEC), R. Degraeve(IMEC), Christoph Adelmann(Imec the Netherlands), Ludovic Goux(IMEC), Y. Y Chen(IMEC), G. Polimeni(IMEC), Dirk J. Wouters(IMEC)
Unknown
May 1, 2014
10.1109/imw.2014.6849354
Cited by 20

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