The future of high-K on pure germanium and its importance for Ge CMOS

Marc Meuris(IMEC), Marc Heyns(IMEC), T. Schram(IMEC), Jan Van Steenbergen(IMEC), Annelies Delabie(IMEC), S. Biesemans(IMEC), P. Mertens(IMEC), Bart Onsia, Michel Houssa(IMEC), P. Mijlemans(Umicore (Belgium)), Chao Zhao, Thierry Conard(IMEC), Gillis Winderickx(IMEC), Riikka L. Puurunen(Aalto University), Matty Caymax(IMEC), Brice De Jaeger(IMEC), Ivo Teerlinck(IMEC), Bert Brijs(IMEC), Stefan De Gendt(Imec the Netherlands), G. Raskin(Umicore (Belgium)), Peter Verheyen(IMEC), T. Chiarella(IMEC), Stefan Kubicek(Austrian Academy of Sciences), E. Van Moorhem(IMEC), Sven Van Elshocht(Columbia University), Wilfried Vandervorst(Imec the Netherlands), Olivier Richard(IMEC)
Materials Science in Semiconductor Processing
November 16, 2004
Cited by 18


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