Modulation of the effective work function of fully-silicided (FUSI) gate stacks

J. A. Kittl(IMEC), S. Biesemans(IMEC), C. Demeurisse(Imec the Netherlands), S. Brus(University of Liège), Thomas Hoffmann(IMEC), C. Vrancken(IMEC), H.Y. Yu(IMEC), Małgorzata Pawlak(IMEC), Geoffrey Pourtois(IMEC), A. Veloso(IMEC), P. Absil(IMEC), S.Z. Chang(KU Leuven), A. Lauwers(IMEC)
Microelectronic Engineering
May 31, 2007
10.1016/j.mee.2007.04.002
Cited by 10

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