M

Marcos V. Puydinger dos Santos

Universidade Estadual de Campinas (UNICAMP)

3 papers and 14 citations.

3Publications

14Total Citations

Top publicationsby citations

Ga+ focused ion beam lithography as a viable alternative for multiple fin field effect transistor prototyping

Alessandra Leonhardt, Lucas Petersen Barbosa Lima, Marcos V. Puydinger dos Santos et al.|Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena|2016

Cited by 8

A novel self-aligned double patterning integrated with Ga+ focused ion beam milling for silicon nanowire definition

Andressa Macedo Rosa, J. A. Diniz, Alessandra Leonhardt et al.|Microelectronic Engineering|2020

Cited by 6

FinFET prototypes fabricated by aluminium hard mask FIB milling for fin definition and SiON/TiN/Al gate stack

Alessandra Leonhardt, Leandro Tiago Manera, Lucas Petersen Barbosa Lima et al.|Unknown|2016

Cited by 0

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