Ga+ focused ion beam lithography as a viable alternative for multiple fin field effect transistor prototyping
Alessandra Leonhardt(ASM International (Finland)), Lucas Petersen Barbosa Lima(IMEC), Leandro Tiago Manera(Universidade Estadual de Campinas (UNICAMP)), J. A. Diniz(Universidade Estadual de Campinas (UNICAMP)), Marcos V. Puydinger dos Santos(Universidade Estadual de Campinas (UNICAMP))
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
October 4, 2016
Cited by 8
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