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Leandro Tiago Manera

Universidade Estadual de Campinas (UNICAMP)

4 papers and 17 citations.

4Publications

17Total Citations

Top publicationsby citations

Ga+ focused ion beam lithography as a viable alternative for multiple fin field effect transistor prototyping

Alessandra Leonhardt, Lucas Petersen Barbosa Lima, Leandro Tiago Manera et al.|Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena|2016

Cited by 8

A novel self-aligned double patterning integrated with Ga+ focused ion beam milling for silicon nanowire definition

Andressa Macedo Rosa, J. A. Diniz, Lucas Petersen Barbosa Lima et al.|Microelectronic Engineering|2020

Cited by 6

Effective device electrical parameter extraction of nanoscale FinFETs: Challenges and results

Alessandra Leonhardt, Leandro Tiago Manera, Luiz Fernando Ferreira et al.|Unknown|2015

Cited by 3

FinFET prototypes fabricated by aluminium hard mask FIB milling for fin definition and SiON/TiN/Al gate stack

Alessandra Leonhardt, Leandro Tiago Manera, J. A. Diniz et al.|Unknown|2016

Cited by 0

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