FinFET prototypes fabricated by aluminium hard mask FIB milling for fin definition and SiON/TiN/Al gate stack
Alessandra Leonhardt(ASM International (Finland)), Leandro Tiago Manera(Universidade Estadual de Campinas (UNICAMP)), J. A. Diniz(Universidade Estadual de Campinas (UNICAMP)), Frederico H. Cioldin(Universidade Estadual de Campinas (UNICAMP)), Marcos V. Puydinger dos Santos(Universidade Estadual de Campinas (UNICAMP)), Lucas Petersen Barbosa Lima(IMEC)
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