Advanced Nanoanalysis of a Hf-Based High-k Dielectric Stack Prior to ActivationMhairi Mackenzie, S. McFadzean, A. J. Craven et al.|Electrochemical and Solid-State Letters|2007Cited by 5
A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on siliconF.T. Docherty, Catriona M. McGilvery, Mhairi Mackenzie et al.|Microelectronic Engineering|2007Cited by 4
Nucleation, Crystallisation and Phase Segregation in HfO2 and HfSiOCatriona M. McGilvery, Stefan De Gendt, A. J. Craven et al.|Springer proceedings in physics|2008Cited by 3
Electron Energy-Loss Spectrum Imaging of an HfSiO High-k Dielectric Stack with a TaN Metal GateMhairi Mackenzie, Stefan De Gendt, David W. McComb et al.|Springer proceedings in physics|2008Cited by 1
EELS analyses of metal-inserted high-k dielectric stacksMhairi Mackenzie, Stefan De Gendt, A. J. Craven et al.|Unknown|2008Cited by 0