Electron Energy-Loss Spectrum Imaging of an HfSiO High-k Dielectric Stack with a TaN Metal Gate
Mhairi Mackenzie(Urban Big Data Centre), Stefan De Gendt(Imec the Netherlands), David W. McComb(The Ohio State University), Catriona M. McGilvery(Imperial College London), A. J. Craven(University of Glasgow), S. McFadzean(University of Glasgow)
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