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Sample preparation for nanoanalytical electron microscopy using the FIB lift-out method and low energy ion millingJ. Scott, A. J. Craven, Mhairi Mackenzie et al.|Journal of Physics Conference Series|2006Cited by 18
Advanced Nanoanalysis of a Hf-Based High-k Dielectric Stack Prior to ActivationMhairi Mackenzie, S. McFadzean, David W. McComb et al.|Electrochemical and Solid-State Letters|2007Cited by 5
A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on siliconF.T. Docherty, Catriona M. McGilvery, Mhairi Mackenzie et al.|Microelectronic Engineering|2007Cited by 4
Nucleation, Crystallisation and Phase Segregation in HfO2 and HfSiOCatriona M. McGilvery, Stefan De Gendt, S. McFadzean et al.|Springer proceedings in physics|2008Cited by 3