EELS analyses of metal-inserted high-k dielectric stacks

Mhairi Mackenzie(Urban Big Data Centre), Stefan De Gendt(Imec the Netherlands), David W. McComb(The Ohio State University), Catriona M. McGilvery(Imperial College London), A. J. Craven(University of Glasgow), S. McFadzean(University of Glasgow)
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January 1, 2008
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