Advanced Nanoanalysis of a Hf-Based High-k Dielectric Stack Prior to Activation

Mhairi Mackenzie(Urban Big Data Centre), S. McFadzean(University of Glasgow), David W. McComb(The Ohio State University), A. J. Craven(University of Glasgow), F.T. Docherty(Imperial College London), Catriona M. McGilvery(Imperial College London), Stefan De Gendt(Imec the Netherlands)
Electrochemical and Solid-State Letters
January 1, 2007
Cited by 5


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