A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

F.T. Docherty(Imperial College London), Catriona M. McGilvery(Imperial College London), Stefan De Gendt(Imec the Netherlands), David W. McComb(The Ohio State University), A. J. Craven(University of Glasgow), S. McFadzean(University of Glasgow), Mhairi Mackenzie(Urban Big Data Centre)
Microelectronic Engineering
March 16, 2007
Cited by 4


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