P. P. Mulgrew

7 papers and 149 citations.

7Publications

149Total Citations

Top publicationsby citations

Characterization of near-field holography grating masks for optoelectronics fabricated by electron beam lithography

D. M. Tennant, J-M. Verdiell, T. L. Koch et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1992

Cited by 49

89-GHz f/sub T/ room-temperature silicon MOSFETs

Ran Yan, A. Ourmazd, M.D. Morris et al.|IEEE Electron Device Letters|1992

Cited by 28

High performance 0.1- mu m room temperature Si MOSFETs

Ran Yan, A. Ourmazd, K.F. Lee et al.|Unknown|2003

Cited by 22

Characterization of AZ PN114 resist for high resolution using electron-beam and soft-x-ray projection lithographies

K. Early, O. R. Wood, D. M. Tennant et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1992

Cited by 14

Mask technologies for soft-x-ray projection lithography at 13 nm

D. M. Tennant, O. R. Wood, Linus A. Fetter et al.|Applied Optics|1993

Cited by 14

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