R. Gwilliam

University of Surrey

24 papers and 173 citations.

24Publications

173Total Citations

Top publicationsby citations

Vacancy-engineering implants for high boron activation in silicon on insulator

Andrew J. Smith, Mario Barozzi, R. Gwilliam et al.|Applied Physics Letters|2006

Cited by 26

Antimony for n-type metal oxide semiconductor ultrashallow junctions in strained Si: A superior dopant to arsenic?

Nick S. Bennett, P.J. McNally, L. O’Reilly et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|2008

Cited by 23

Differential Hall profiling of ultra-shallow junctions in Si and SOI

Nick S. Bennett, B.J. Sealy, N. E. B. Cowern et al.|Materials Science and Engineering B|2005

Cited by 19

Highly conductive Sb-doped layers in strained Si

Nick S. Bennett, H. Kheyrandish, R. Gwilliam et al.|Applied Physics Letters|2006

Cited by 19

Role of self-interstitials on B diffusion in Ge

G. G. Scapellato, F. Priolo, E. Bruno et al.|Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms|2011

Cited by 10

Indexing the rest of 24 publications…