Differential Hall profiling of ultra-shallow junctions in Si and SOI

Nick S. Bennett(University of Surrey), B.J. Sealy(University of Surrey), Andrew J. Smith(Intel (United States)), R. Gwilliam(University of Surrey), N. E. B. Cowern(University of Surrey), B. Colombeau(University of Surrey)
Materials Science and Engineering B
September 22, 2005
10.1016/j.mseb.2005.08.020
Cited by 19

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