Vacancy-engineering implants for high boron activation in silicon on insulator

Andrew J. Smith(Intel (United States)), Mario Barozzi(Fondazione Bruno Kessler), B.J. Sealy(University of Surrey), R. Gwilliam(University of Surrey), N. E. B. Cowern(University of Surrey), M. Bersani(University of Surrey), S. Gennaro(University of Surrey), E. J. H. Collart(University of Surrey), B. Colombeau, D. Giubertoni(Fondazione Bruno Kessler)
Applied Physics Letters
February 20, 2006
Cited by 26


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