NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detectorDoris K. T. Ng, Lennon Y. T. Lee, Chong Pei Ho et al.|Sensors and Actuators B Chemical|2021Cited by 63
A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitrideDoris K. T. Ng, Navab Singh, Xu Liang et al.|Applied Physics Letters|2020Cited by 30
Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas SensorsDoris K. T. Ng, Navab Singh, Guoqiang Wu et al.|Journal of Microelectromechanical Systems|2020Cited by 27
Cmos-Mems SC<sub>0.12</sub>AL<sub>0.88</sub>N-Based Pyroelectric Infared Detector with CO<sub>2</sub> Gas SensingDoris K. T. Ng, Lennon Y. T. Lee, Chong Pei Ho et al.|Unknown|2021Cited by 9
CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlNDoris K. T. Ng, Navab Singh, Tan‐Tan Zhang et al.|Unknown|2021Cited by 9