Cmos-Mems SC<sub>0.12</sub>AL<sub>0.88</sub>N-Based Pyroelectric Infared Detector with CO<sub>2</sub> Gas Sensing

Doris K. T. Ng(Agency for Science, Technology and Research), Lennon Y. T. Lee(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics), Li-Yan Siow(Agency for Science, Technology and Research), Chong Pei Ho(Agency for Science, Technology and Research), Qingxin Zhang(Shaanxi Normal University), Tan‐Tan Zhang(Agency for Science, Technology and Research), Linfang Xu(Agency for Science, Technology and Research), Eldwin J. Ng(Agency for Science, Technology and Research)
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January 25, 2021
Cited by 9


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