Cmos-Mems SC<sub>0.12</sub>AL<sub>0.88</sub>N-Based Pyroelectric Infared Detector with CO<sub>2</sub> Gas Sensing
Doris K. T. Ng(Agency for Science, Technology and Research), Lennon Y. T. Lee(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics), Li-Yan Siow(Agency for Science, Technology and Research), Chong Pei Ho(Agency for Science, Technology and Research), Qingxin Zhang(Shaanxi Normal University), Tan‐Tan Zhang(Agency for Science, Technology and Research), Linfang Xu(Agency for Science, Technology and Research), Eldwin J. Ng(Agency for Science, Technology and Research)
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