Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors

Doris K. T. Ng(Agency for Science, Technology and Research), Navab Singh(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics), Wing-Wai Chung(Agency for Science, Technology and Research), Jianbo Sun(Huazhong University of Science and Technology), Qingxin Zhang(Shaanxi Normal University), Guoqiang Wu(Shenzhen Institutes of Advanced Technology), Linfang Xu(Agency for Science, Technology and Research), Tan‐Tan Zhang(Agency for Science, Technology and Research)
Journal of Microelectromechanical Systems
August 17, 2020
Cited by 27


Related Papers