CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN
Doris K. T. Ng(Agency for Science, Technology and Research), Navab Singh(Agency for Science, Technology and Research), Chong Pei Ho(Agency for Science, Technology and Research), Li Yan Siow(Agency for Science, Technology and Research), Lennon Y. T. Lee(Agency for Science, Technology and Research), Wing Wai Chung(Agency for Science, Technology and Research), Qingxin Zhang(Shaanxi Normal University), Tan‐Tan Zhang(Agency for Science, Technology and Research), Linfang Xu(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics)
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