A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride
Doris K. T. Ng(Agency for Science, Technology and Research), Navab Singh(Agency for Science, Technology and Research), Xu Liang(Agency for Science, Technology and Research), Chong Pei Ho(Agency for Science, Technology and Research), Li Yan Siow(Agency for Science, Technology and Research), Lennon Y. T. Lee(Agency for Science, Technology and Research), Tan‐Tan Zhang(Agency for Science, Technology and Research), Q. Zhang(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics)
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