NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector
Doris K. T. Ng(Agency for Science, Technology and Research), Lennon Y. T. Lee(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics), Chong Pei Ho(Agency for Science, Technology and Research), Li Yan Siow(Agency for Science, Technology and Research), Yuan Hsing Fu(Agency for Science, Technology and Research), Yuan Gao(University of Jinan), Norhanani Jaafar(Agency for Science, Technology and Research), Weiguo Chen(Agency for Science, Technology and Research), Qingxin Zhang(Shaanxi Normal University), Tan‐Tan Zhang(Agency for Science, Technology and Research), Linfang Xu(Agency for Science, Technology and Research), Eldwin J. Ng(Agency for Science, Technology and Research)
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