Vt Fine-Tuning for Multi-Vt using Wet Fine-Etching of LaO in Dipole-first

Hikaru Kawarazaki, Efrain Altamirano Sánchez, Dai Ueda, Naveen Reddy, S. Brus(University of Liège), Yoïchi Tanaka(Mercy Willard Hospital), Ju-Geng Lai, Naoto Horiguchi(IMEC), Hideaki Iino(Kurita Water Industries (Japan)), Nobuko Gan(Kurita Water Industries (Japan)), L. Lukose(IMEC), Minsoo Kim, Yuuichi Ogawa(Kurita Water Industries (Japan)), Hiroaki Arimura(IMEC), Takayoshi Tanaka, Yukifumi Yoshida
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September 16, 2025
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