Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions
J. Franco(KU Leuven), Naoto Horiguchi(IMEC), S. Brus(University of Liège), B. Kaczer(IMEC), Kristof Croes(IMEC), Hiroaki Arimura(IMEC), R. Ritzenthaler(IMEC), Jean‐François de Marneffe(IMEC)
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