Failure analysis on MIMCAP failures of 10nm devices using phase angle measurement method

Hsu Li khoo(Intel (Malaysia)), Siew Ming Lim(Intel (Malaysia)), Yi Jie N G(Intel (Malaysia)), Chiun Ning Liew(Intel (Malaysia)), Lay Lay Goh(Intel (Malaysia)), Kok Heng Lau(Intel (Malaysia))

Unknown

July 18, 2022

10.1109/ipfa55383.2022.9915778

Cited by 3

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