Orientation Dependence of Si<sub>1-x</sub>C<sub>x</sub>:P Growth and the Impact on FinFET Structures
John Tolle(ASM International), Roger Loo(IMEC), S. Brus(University of Liège), Vladimir Machkaoutsan(ASM International (Belgium)), M. Togo(IMEC), Matthias Bauer(Paderborn University), Doran Weeks, Andriy Hikavyy(IMEC), Jan Willem Maes(ASM International (Belgium))
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