The Deposition of Polycrystalline SiGe with Different Ge Precursors
Xiaoping Shi(IMEC), Deo Shenai(ROHM), Marc Schaekers(IMEC), Frederik Leys(IMEC), E. Woelk(ROHM), Roger Loo(IMEC), Bruno Lamare(ROHM), Chao Zhao, Matty Caymax(IMEC), S. Brus(University of Liège)
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