Ge Single-Crystal-Island (Ge-SCI) Technique and BEOL Ge FinFET Switch Arrays on Top of Si Circuits for Monolithic 3D Voltage Regulators

Hao-Tung Chung(National Yang Ming Chiao Tung University), Chenming Hu(National Yang Ming Chiao Tung University), Wan-Ting Hsu(National Yang Ming Chiao Tung University), Jia‐Min Shieh(Taiwan Semiconductor Manufacturing Company (Taiwan)), Kuan‐Neng Chen(National Yang Ming Chiao Tung University), Bo‐Yuan Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Da‐Chiang Chang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Zhong-Jie Hong(National Yang Ming Chiao Tung University), Nei-Chih Lin(Taiwan Semiconductor Manufacturing Company (Taiwan)), Po-Tsang Huang(National Yang Ming Chiao Tung University), Yu-Ming Pan(National Yang Ming Chiao Tung University), Yunping Lan(National Yang Ming Chiao Tung University), Chang-Hong Shen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Fu-Kuo Hsueh(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chih-Chao Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Wen-Kuan Yeh(Taiwan Semiconductor Manufacturing Company (Taiwan)), K.T. Lai(National Yang Ming Chiao Tung University), Hanwen Hu(North Sichuan Medical University), Huang-Chung Cheng(National Yang Ming Chiao Tung University), Bo-Jheng Shih(National Yang Ming Chiao Tung University)
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December 11, 2021
Cited by 4


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