Material-Selective Doping of 2D TMDC through Al<i><sub>x</sub></i>O<i><sub>y</sub></i> Encapsulation
Alessandra Leonhardt(ASM International (Finland)), Stefan De Gendt(Imec the Netherlands), I. Shlyakhov(KU Leuven), Cedric Huyghebaert(IMEC), Thierry Conard(IMEC), Alexis Franquet(IMEC), Daniele Chiappe(IMEC), Valeri Afanas’ev(IMEC), Salim El Kazzi(IMEC)
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