Gate isolation technology for compact poly-CMP embedded flash memories
M. Slotboom(Philips (Belgium)), Ivan Pollentier(IMEC), P. Goarin(Philips (Belgium)), N. Heylen(IMEC), Kris Baert(Ghent University), N. Akil(Philips (Belgium)), S. Beckx(Imec the Netherlands), Philippe Leray(IMEC), Johan M. Wouters(IMEC), C. Baertsb, M. van Duuren(Philips (Belgium)), M. Demand(IMEC)
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