Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography
Wim Bogaerts(Ghent University), Roel Baets(Ghent University), Bert Luyssaert(Ghent University), Dirk Taillaert(Ghent University), Vincent Wiaux(Imec the Netherlands), Peter Bienstman(Ghent University Hospital), S. Beckx(Imec the Netherlands)
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