Thin L-shaped spacers for CMOS devices

E. Augendre(IMEC), I. Debusschere(IMEC), Muriel de Potter de ten Broeck(IMEC), C. Vrancken(IMEC), T. Chiarella(IMEC), E. Kunnen(IMEC), S. Beckx(Imec the Netherlands), V. Vassilev(IMEC), G. Mannaert(IMEC), R. Rooyackers(IMEC), M. Jurczak(IMEC)
Unknown
March 23, 2004
Cited by 4


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