Thin L-shaped spacers for CMOS devices
E. Augendre(IMEC), I. Debusschere(IMEC), Muriel de Potter de ten Broeck(IMEC), C. Vrancken(IMEC), T. Chiarella(IMEC), E. Kunnen(IMEC), S. Beckx(Imec the Netherlands), V. Vassilev(IMEC), G. Mannaert(IMEC), R. Rooyackers(IMEC), M. Jurczak(IMEC)
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