Orientation Dependence of Si<sub>1-x</sub>C<sub>x</sub>:P Growth and the Impact on FinFET Structures
John Tolle(ASM International), Roger Loo(IMEC), K. Doran Weeks(ASM International), Vladimir Machkaoutsan(ASM International (Belgium)), Andriy Hikavyy(IMEC), M. Togo(IMEC), Matthias Bauer(Paderborn University), S. Brus(University of Liège), Jan Willem Maes(ASM International (Belgium))
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