The Deposition of Polycrystalline SiGe with Different Ge Precursors
Xiaoping Shi(IMEC), Deo Shenai(ROHM), Marc Schaekers(IMEC), Chao Zhao, Frederik Leys(IMEC), Roger Loo(IMEC), Matty Caymax(IMEC), Bruno Lamare(ROHM), E. Woelk(ROHM), S. Brus(University of Liège)
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