Low Temperature Pre-Epi Treatment: Critical Parameters to Control Interface Contamination
Roger Loo(IMEC), Matty Caymax(IMEC), Brecht De Vos, Eddy Simoen(IMEC), Andriy Hikavyy(IMEC), Frederik Leys(IMEC), Mireia Bargalló González(IMEC), M. Wada(Nicolaus Copernicus Astronomical Center), Antoine Pacco, Peter Verheyen(IMEC), Ken‐Ichi Sano(Screen), Wendy Vanherle(IMEC)
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
January 1, 2009
Cited by 23
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