Analysis of the Leakage Current Origin in Thin Strain Relaxed Buffer Substrates
Geert Eneman(Research Foundation - Flanders), K. De Meyer(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), Romain Delhougne(IMEC), Roger Loo(IMEC), Veerle Simons(IMEC), Peter Verheyen(IMEC), Cor Claeys(IMEC), Eddy Simoen(IMEC)
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