Phase-measuring interferometry using extreme ultraviolet radiation

J. E. Bjorkholm(AT&T (United States)), D. M. Tennant(University of Tennessee at Knoxville), Zhuopeng Tan(AT&T (United States)), Alastair A. MacDowell(AT&T (United States)), Bruno LaFontaine(AT&T (United States)), O. R. Wood(AT&T (United States))

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

November 1, 1995

10.1116/1.588279

Cited by 32

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