Zhuopeng Tan

2 papers and 52 citations.

2Publications

52Total Citations

Top publicationsby citations

Phase-measuring interferometry using extreme ultraviolet radiation

J. E. Bjorkholm, D. M. Tennant, Bruno LaFontaine et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1995

Cited by 32

Alignment of a multilayer-coated imaging system using extreme ultraviolet Foucault and Ronchi interferometric testing

Avijit K. Ray-Chaudhuri, S. J. Spector, W. Ng et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1995

Cited by 20

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