Atomic Layer Deposition of High-κ Dielectrics on Sulphur-Passivated Germanium
Sonja Sioncke(IMEC), Matty Caymax(IMEC), Matthias Müller(University of Oxford), Guy Brammertz(IMEC), Herbert Struyf(IMEC), Thierry Conard(IMEC), Marc Heyns(IMEC), Alexis Franquet(IMEC), Stefan De Gendt(Imec the Netherlands), Claudia Fleischmann(IMEC), K. Temst(KU Leuven), Marc Meuris(IMEC), A. Vantomme(KU Leuven), H. C. Lin(IMEC), Annelies Delabie(IMEC), Burkhard Beckhoff(Physikalisch-Technische Bundesanstalt), Michael Kolbe(Physikalisch-Technische Bundesanstalt)
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