Atomic Layer Deposition of High-κ Dielectrics on Sulphur-Passivated GermaniumSonja Sioncke, Matty Caymax, Marc Meuris et al.|Journal of The Electrochemical Society|2011Cited by 21
Atomic layer deposition of Al2O3 on S-passivated GeSonja Sioncke, Matty Caymax, Burkhard Beckhoff et al.|Microelectronic Engineering|2011Cited by 19
S-passivation of the Ge gate stack: Tuning the gate stack properties by changing the atomic layer deposition oxidant precursorSonja Sioncke, Matty Caymax, Hang-Chun Lin et al.|Journal of Applied Physics|2011Cited by 19